Semiconductor
Precision, Purity, and Performance—Engineered for the Semiconductor Frontier
In the semiconductor industry, where even the slightest trace of contamination can compromise performance, Savillex stands as a trusted partner in purity. For over four decades, we’ve specialized in crafting high-performance fluoropolymer solutions that meet the rigorous demands of semiconductor manufacturing, analysis, and innovation.
Why Semiconductor Leaders Choose Savillex
Semiconductor manufacturers operate at the cutting edge of technology—pushing boundaries in trace metals detection, ultrapure chemical handling, and contamination control. Savillex’s unmatched expertise in fluoropolymer molding, in-house tooling, and clean manufacturing environments ensures that our products deliver:
- Ultra-low contamination levels
- Exceptional chemical inertness
- Superior thermal and mechanical stability
- Consistent performance in high-purity applications
Solutions Tailored for Semiconductor Excellence
Our portfolio of PFA-based products is engineered to support every stage of semiconductor production and analysis:
ICP-MS Sample Introduction Systems
Savillex is the global leader in inert sample introduction systems for ICP-MS—used more widely in semiconductor labs than any other manufacturer. Our systems help labs achieve ever-lower detection limits, ensuring accurate trace metals analysis in ultrapure chemicals and process fluids.
Custom Molded Components
From wet etching tools and solution control systems to digestion tubes, pressure vessels, and ported closures, Savillex designs and manufactures custom parts that integrate seamlessly into semiconductor equipment. Our in-house tool design and fluoropolymer molding expertise allow for rapid prototyping and precise engineering—no matter how complex the application.
Containers and Labware
Our PFA jars, vials, and filtration housings are trusted for their purity and durability. Manufactured in ISO Class 7 cleanrooms with proprietary molding technologies, these containers support contamination-free storage, transport, and processing of high-purity chemicals.
Built for Your Process. Backed by Our Expertise.
Whether you're developing next-generation chips or refining ultrapure chemical workflows, Savillex partners with you from concept to creation. Our team works closely with semiconductor engineers and lab managers to deliver custom-engineered solutions that improve efficiency, reduce costs, and meet the industry's most stringent standards.
Let’s Build the Future Together
Explore how Savillex can elevate your semiconductor operations. Contact us today to discuss your application needs or request a custom solution.
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DST-1000 Acid Purification System, 100 V
- All wetted parts are molded PFA
- No cooling water required
- Complete with heating source, separate control unit, GL45 1/4" transfer closure, and all necessary fittings
- CE certified and RoHS compliant
- Includes a bottle bracket and a Savillex 1000 mL PFA Bottle
- Depending on the usage rate of high purity acid in your lab, a DST-1000 can pay for itself in months or even weeks
- One year parts warranty
$8,891.06
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DST-1000 Acid Purification System, 115 V
- All wetted parts are molded PFA
- No cooling water required
- Complete with heating source, separate control unit, GL45 1/4" transfer closure, and all necessary fittings
- CE certified and RoHS compliant
- Includes a bottle bracket and a Savillex 1000 mL PFA Bottle
- Depending on the usage rate of high purity acid in your lab, a DST-1000 can pay for itself in months or even weeks
- One year parts warranty
$8,788.48
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DST-1000 Acid Purification System, 230 V
- All wetted parts are molded PFA
- No cooling water required
- Complete with heating source, separate control unit, GL45 1/4" transfer closure, and all necessary fittings
- CE certified and RoHS compliant
- Includes a bottle bracket and a Savillex 1000 mL PFA Bottle
- Depending on the usage rate of high purity acid in your lab, a DST-1000 can pay for itself in months or even weeks
- One year parts warranty
$8,788.48
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DST-1000 Acid Purification System, 230 V, UK 3-Pin Fused Plug
- All wetted parts are molded PFA
- No cooling water required
- Complete with heating source, separate control unit, GL45 1/4" transfer closure, and all necessary fittings
- Configured with UK BS-1363 3-pin fused plug
- CE certified and RoHS compliant
- Includes a bottle bracket and a Savillex 1000 mL PFA Bottle
- Depending on the usage rate of high purity acid in your lab, a DST-1000 can pay for itself in months or even weeks
- One year parts warranty
$8,788.48
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DST-4000 Acid Purification System, 120 V
- All wetted parts are molded PFA
- No cooling water required
- Graduated front fill tube shows acid level remaining
- Separate, digital temperature controller with auto shut-off feature
- Includes (2) 2000 mL Lab Bottles (150-01-2000)
- CE certified and RoHS compliant
- One year parts warranty
$14,164.67
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DST-4000 Acid Purification System, 230 V
- All wetted parts are molded PFA
- No cooling water required
- Graduated front fill tube shows acid level remaining
- Separate, digital temperature controller with auto shut-off feature
- Includes (2) 2000 mL Lab Bottles (150-01-2000)
- CE certified and RoHS compliant
- One year parts warranty
$14,164.67
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DST-4000 Acid Purification System, 230UK
- All wetted parts are molded PFA
- No cooling water required
- Graduated front fill tube shows acid level remaining
- Separate, digital temperature controller with auto shut-off feature
- Includes (2) 2000 mL Lab Bottles (150-01-2000)
- CE certified and RoHS compliant
- One year parts warranty
$14,164.67
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2 mL PFA Vial, Conical Interior
- Comparable to Agilent ICP-MS part number G3160-65315 but in PFA (2 mL polyethylene vial for I-AS tray type D)
- Alternative to ESI part number V-14-0312CG-X (2 mL PFA vial)
- Slightly conical interior base
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
Material: PFAVolume: 2 mL$8.38
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4 mL PFA Vial, Rounded Interior
- Comparable to Agilent ICP-MS part number G3160-65303 but in PFA (6 mL polypropylene vial for I-AS tray type A and E)
- Same product as Cetac ASX110/112 part number SP6332 (4 mL PFA vial)
- Fits other autosamplers used in ICP-MS and GFAAS
- Rounded interior base
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
Material: PFAVolume: 4 mL$22.59
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4 mL PFA Vial, Conical Interior
- Alternative to ESI part number V-14-0314CG-X (4 mL PFA vial)
- Slightly conical interior base
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- Note: For an alternative to comparable Agilent ICP-MS part number G3160-65303 (6 mL polypropylene vial for I-AS tray type A and E), choose part number 200-004-13 instead
Material: PFAVolume: 4 mL$16.23
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10 mL PFA Vial – ASX Autosampler compatible
- Same product as Cetac ASX110/112 part number SP6334 (10 mL PFA vial)
- Fits other autosamplers used in ICP-MS and GFAAS
- Rounded interior base
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
Material: PFAVolume: 10 mL$26.46
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13 mL PFA Vial, Flat Interior
- Comparable to Agilent ICP-MS part number G3160-65304 but in PFA (18 mL polypropylene vial for I-AS tray type B, D and E)
- Fits other autosamplers used in ICP-MS and GFAAS
- Flat interior base
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
Material: PFAVolume: 1.3 mL$28.49
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20 mL PFA Vial – ASX Autosampler compatible
- Same product as Cetac ASX110/112 part number SP6333 (20 mL PFA vial)
- Fits other autosamplers used in ICP-MS and GFAAS
- Shallow tapered interior base
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
Material: PFAVolume: 20 mL$30.55
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30 mL PFA Vial – ASX Autosampler compatible
- Same product as Cetac ASX110/112 part number SP6335 (30 mL PFA vial)
- Fits other autosamplers used in ICP-MS and GFAAS
- Shallow tapered interior base
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
Material: PFAVolume: 30 mL$47.60
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200 µL PFA Vial, Conical Interior, Threaded Opening
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- Standard 12x32 autosampler vial
Material: PFAVolume: 0.2 mL$17.45
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200 µL PFA Vial, Conical Interior, Crimp Top Opening
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- Standard 12x32 autosampler vial
- Vial accommodates standard 11mm crimp top closure
Material: PFAVolume: 0.2 mL$16.03
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500 µL PFA Vial, Straight Interior, Threaded Opening
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- Standard 12x32 autosampler vial
Material: PFAVolume: 0.5 mL$12.38
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500 µL PFA Vial, Straight Interior, Crimp Top Opening
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- Standard 12x32 autosampler vial
- Vial accommodates standard 11 mm crimp top closure
Material: PFAVolume: 0.5 mL$14.81
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1.3 mL PFA Vial, Conical Interior
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- 13 mm opening
- Designed specifically for GFAA autosamplers on PE and Varian instruments
Material: PFAVolume: 1.3 mL$16.68
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1.5 mL PFA Vial, Conical Interior
- Comparable to Agilent ICP-MS part number G3160-65317 (1.5 mL PFA vial for I-AS tray type D)
- Same product as Cetac ASX110/112 part number SP5472 (1.5 mL PFA vial)
- Fits other autosamplers used in ICP-MS and GFAAS
- Slightly conical interior base
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
Material: PFAVolume: 1.5 mL$13.57
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25 mm Single Stage Filter Assembly, 1/8" x 1/8"
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- Hand tighten, no wrench required
- Ferrule nut connections for 1/8” tubing on inlet and outlet
$230.90
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25 mm Single Stage Filter Assembly, 1/4" x 1/4"
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- Hand tighten, no wrench required
- Ferrule nut connections for ¼” tubing on inlet and outlet
$155.80
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47 mm Single Stage Filter Assembly, 1/4" x 1/4", PFA Clamp
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- PFA clamp nut for higher temperature applications
- Recommend wrench set for assembly
Material: PFA$186.86
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47 mm Single Stage Filter Assembly, 1/4" x 1/4", Tefzel® Clamp
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- TefzelTM clamp nut for higher pessure applications
- TefzelTM service temperature range (300°C/148°C)
- Recommend wrench set for assembly
$185.82
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50 mm Single Stage Filter Assembly, 1/4" x 1/4", PFA Clamp
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- PFA clamp nut for higher temperature applications
- Recommend wrench set for assembly
- Suitable as particulate filter for EPA method 16A
Material: PFA$223.01
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50 mm Single Stage Filter Assembly, 1/4" x 1/4", Tefzel® Clamp
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- TefzelÒ clamp nut for higher pressure applications
- TefzelÒ service temperature range (300/148)
- Recommend wrench set for assembly
$214.66
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47 mm Single Stage Filter Assembly, 1/4" MNPT x 1/4" MNPT, PFA Clamp
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- TefzelÒ clamp nut for higher pressure applications
- TefzelÒ service temperature range (300/148)
- Recommend wrench set for assembly
Material: PFA$186.99
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50 mm Single Stage Filter Assembly, 1/2" x 1" x 1/2" x 1", PFA clamp
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- PFA clamp nut for higher temperature applications
- Recommend wrench set for assembly
Material: PFA$222.96
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50 mm Single Stage Filter Assembly, 1/2" x 1" x 1/2" x 1", Tefzel®
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- Tefzel clamp nut for higher pressure applications
- Tefzel service temperature range (300/148)
- Recommend wrench set for assembly
$229.18
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13 mm Single Stage Filter Assembly, Female Leur-Lock Inlet
- Service temperature range is 275°F/135°
- Two-piece design allows changing membranes without disconnecting lines
- Female luer lock inlet for syringe attachment
- Male luer slip outlet
- Compatible with Savillex PFA Syringe (P/N 700-510)
- Bi-directional membrane support accepts 13 mm filter membranes
$112.88
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- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- PFA body with stainless steel support grid
- Used for Dissolved and Particulate Carbon Analysis
- Features 1/4” inlet and outlet ports. Two 1/4in PFA ferrule nuts are included, to accept 1/4” OD tubing
- Wrench set for assembly is included
- Fluorocarbon Pressure Filtration Unit - DOC 47 Configuration
- 150 mL reservoir for sample
- Reference U.S.G.S National Field Manual for the Collection of Water-Quality Data
- Filters must be purchased separately
Filter Holder Assembly - U.S. Geological Survey - DOC 47 Configuration
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- PFA body with stainless steel support grid
- Used for Dissolved and Particulate Carbon Analysis
- Features 1/4” inlet and outlet ports. Two 1/4in PFA ferrule nuts are included, to accept 1/4” OD tubing
- Wrench set for assembly is included
- Fluorocarbon Pressure Filtration Unit - DOC 47 Configuration
- 150 mL reservoir for sample
- Reference U.S.G.S National Field Manual for the Collection of Water-Quality Data
- Filters must be purchased separately
$431.56
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- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- PFA body with stainless steel support grid
- Used for Dissolved Organic Carbon Analysis
- Fluorocarbon Pressure Filtration Unit - DOC 25 configuration
- Reference USGS National Field Manual Procedures for Processing Samples for Analysis of Dissolved Organic Carbon and Inorganic and Organic Particulate Carbon
- Filters must be purchased separately
Filter Holder Assembly - U.S.Geological Survey - DOC 25 Configuration
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- PFA body with stainless steel support grid
- Used for Dissolved Organic Carbon Analysis
- Fluorocarbon Pressure Filtration Unit - DOC 25 configuration
- Reference USGS National Field Manual Procedures for Processing Samples for Analysis of Dissolved Organic Carbon and Inorganic and Organic Particulate Carbon
- Filters must be purchased separately
$428.11
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47 mm Two-Stage Filter Assembly, 1-1/2" x 1/4", PFA Clamp
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- PFA clamp nut for higher temperature applications
- Recommend wrench set for assembly
Material: PFA$256.83
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47 mm Two-Stage Filter Assembly, 1-1/2' x 3/8", PFA Clamp
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- PFA clamp nut for higher temperature applications
- Recommend wrench set for assembly
Material: PFA$266.23
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47 mm Two-Stage Filter Assembly, 1-1/2" x 1/4" MNPT, PFA Clamp
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- PFA clamp nut for higher temperature applications
- Recommend wrench set for assembly
Material: PFA$263.52
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47 mm Two-Stage Filter Assembly, 1/4" x 1/4", PFA Clamp
- Service temperature range of PFA is ‑328°F to 500°F (‑200°C to 260°C)
- All wetted components are molded PFA
- Filter membranes can be replaced without disconnecting lines
- PFA clamp nut for higher temperature applications
- Recommend wrench set for assembly
Material: PFA$238.86